Corrugated Magnetoresistive Sensor
Original Publication Date: 1983-Jan-01
Included in the Prior Art Database: 2005-Feb-06
In order to minimize Barkhausen noise in a small magnetoresistive sensor 1, the thickness of the sensor is reduced in the areas where the geometric fields dictate the formation of domain walls 2, thereby resulting in a corrugated cross-section, as illustrated in Fig. 1. The selective thinning is accomplished by sputter etching through a photoresist mask of proper dimensions to form grooves 3 in the sensor structure.