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Corrugated Magnetoresistive Sensor

IP.com Disclosure Number: IPCOM000044928D
Original Publication Date: 1983-Jan-01
Included in the Prior Art Database: 2005-Feb-06

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Decker, SK Toxen, AM Tsang, CH Voegeli, O [+details]


In order to minimize Barkhausen noise in a small magnetoresistive sensor 1, the thickness of the sensor is reduced in the areas where the geometric fields dictate the formation of domain walls 2, thereby resulting in a corrugated cross-section, as illustrated in Fig. 1. The selective thinning is accomplished by sputter etching through a photoresist mask of proper dimensions to form grooves 3 in the sensor structure.