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ROI Isolation Process to Minimize Bird's Beak Disclosure Number: IPCOM000045080D
Original Publication Date: 1983-Jan-01
Included in the Prior Art Database: 2005-Feb-06

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Barson, F [+details]


The growth of bird's beak during selective recessed oxide isolation (ROI), oxidation is particularly troublesome in small, high speed devices, since the structure wastes significant lateral space and does not permit minimum device size.