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ROI Isolation Process to Minimize Bird's Beak

IP.com Disclosure Number: IPCOM000045080D
Original Publication Date: 1983-Jan-01
Included in the Prior Art Database: 2005-Feb-06

Publishing Venue

IBM

Related People

Authors:
Barson, F [+details]

Abstract

The growth of bird's beak during selective recessed oxide isolation (ROI), oxidation is particularly troublesome in small, high speed devices, since the structure wastes significant lateral space and does not permit minimum device size.