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Wafer Serial Number Reader Disclosure Number: IPCOM000045090D
Original Publication Date: 1983-Jan-01
Included in the Prior Art Database: 2005-Feb-06

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Hebert, RC Nielsen, DA [+details]


This article concerns apparatus for inexpensively reading theta modulated wafer identification numbers. The apparatus features use of a laser symbol reader in combination with a computer-controlled wafer alignment table. The apparatus automatically reads the identification number and displays the number to an operator.