Browse Prior Art Database

Wafer Serial Number Reader

IP.com Disclosure Number: IPCOM000045090D
Original Publication Date: 1983-Jan-01
Included in the Prior Art Database: 2005-Feb-06

Publishing Venue

IBM

Related People

Authors:
Hebert, RC Nielsen, DA [+details]

Abstract

This article concerns apparatus for inexpensively reading theta modulated wafer identification numbers. The apparatus features use of a laser symbol reader in combination with a computer-controlled wafer alignment table. The apparatus automatically reads the identification number and displays the number to an operator.