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Measurement of Temperature in Vacuum Deposition Apparatus

IP.com Disclosure Number: IPCOM000045112D
Original Publication Date: 1983-Feb-01
Included in the Prior Art Database: 2005-Feb-06

Publishing Venue

IBM

Related People

Authors:
Hornbeck, F Stewart, W Thoman, H Wilk, R [+details]

Abstract

Thermocouples are mounted on circuit devices or other components that are carried on a rotating dome in a vacuum deposition apparatus. The dome carries a dielectric support at its upper end, and a set of slip rings are mounted on the support. The slip rings are concentric, coplanar, and upward facing. A bell jar carries a matching dielectric support and a set of contacts. The contact support is fixed with respect to the bell jar, and electrical leads pass through a permanent seal in the bell jar. The contacts extend downwardly and ride on the slip rings when the bell jar is in place. Thus, the thermocouples and their connections do not interfere with the usual operation of the vacuum deposition apparatus.