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Method of Plasma Treatment on Magnetic Coatings

IP.com Disclosure Number: IPCOM000045128D
Original Publication Date: 1983-Feb-01
Included in the Prior Art Database: 2005-Feb-06

Publishing Venue

IBM

Related People

Authors:
Ko, M [+details]

Abstract

Plasma consists of a gas mixture containing free radicals, excited positively and negatively charged particles and uncharged gases. These plasmas are generated by a radio frequency energy source.