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Bubble Trail Method for Defect Detection

IP.com Disclosure Number: IPCOM000045227D
Original Publication Date: 1983-Feb-01
Included in the Prior Art Database: 2005-Feb-06

Publishing Venue

IBM

Related People

Authors:
Gregor, LV [+details]

Abstract

The detection of pinhole defects in thin films by making the substrate cathodic with respect to a test liquid, such as methanol or H(2)O, is well known, since reduction of species at the pinhole to form H(2) gas results in a bubble trail which is easily observed. The high viscosity of H(2)O and the solubility of many organic films in methanol have limited this technique.