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Enhancement System Bent Chip Monitor Disclosure Number: IPCOM000045229D
Original Publication Date: 1983-Feb-01
Included in the Prior Art Database: 2005-Feb-06

Publishing Venue


Related People

Hopper, GS Jaspal, JS Roush, WB [+details]


The bent chip monitor using direct visual observation of an orthogonally lined grid reflected in the polished backside of a semiconductor wafer is operator sensitive in that operator astigmatism, eyestrain or fatigue impacts the uniformity of inspection results. Such sensitivity is significantly reduced by the use of a TV camera and display unit equipped with telephoto lens and by movably mounting the orthogonally lined grid.