Enhancement System Bent Chip Monitor
Original Publication Date: 1983-Feb-01
Included in the Prior Art Database: 2005-Feb-06
The bent chip monitor using direct visual observation of an orthogonally lined grid reflected in the polished backside of a semiconductor wafer is operator sensitive in that operator astigmatism, eyestrain or fatigue impacts the uniformity of inspection results. Such sensitivity is significantly reduced by the use of a TV camera and display unit equipped with telephoto lens and by movably mounting the orthogonally lined grid.