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Adhesion Promotion for Resist Materials

IP.com Disclosure Number: IPCOM000045239D
Original Publication Date: 1983-Feb-01
Included in the Prior Art Database: 2005-Feb-06

Publishing Venue

IBM

Related People

Authors:
Henderson, GE Kaplan, LH Zaitz, MA [+details]

Abstract

Described here is the use of a solution of bis (trimethylsilyl) trifluoroacetamide (BSTFA) in 1,1,2 trichloro, 1,2,2, trifluoroethane (FREON Trademark of E.I. du Pont de Nemours & Co. TF), to treat a surface to be coated with resist for the purpose of improving the adhesion of the subsequently formed resist patterns to the surface. The solution is best used in conjunction with a subsequent treatment with a dilute water solution of Partial Derivative aminopropyl triethoxysilane (A1100), as is the conventional practice when using pure BSTFA as the adhesion promoter.