Adhesion Promotion for Resist Materials
Original Publication Date: 1983-Feb-01
Included in the Prior Art Database: 2005-Feb-06
Described here is the use of a solution of bis (trimethylsilyl) trifluoroacetamide (BSTFA) in 1,1,2 trichloro, 1,2,2, trifluoroethane (FREON Trademark of E.I. du Pont de Nemours & Co. TF), to treat a surface to be coated with resist for the purpose of improving the adhesion of the subsequently formed resist patterns to the surface. The solution is best used in conjunction with a subsequent treatment with a dilute water solution of Partial Derivative aminopropyl triethoxysilane (A1100), as is the conventional practice when using pure BSTFA as the adhesion promoter.