Browse Prior Art Database

Carbon Grid ION Source

IP.com Disclosure Number: IPCOM000045350D
Original Publication Date: 1983-Mar-01
Included in the Prior Art Database: 2005-Feb-06

Publishing Venue

IBM

Related People

Authors:
Cuomo, JJ Harper, J Kleinsasser, A [+details]

Abstract

Carbon ion extraction grids, used with controlled ion bombardment of the grids, sputter carbon onto the sample and introduce a controllable amount of carbon into an oxide layer.