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Carbon Grid ION Source Disclosure Number: IPCOM000045350D
Original Publication Date: 1983-Mar-01
Included in the Prior Art Database: 2005-Feb-06

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Cuomo, JJ Harper, J Kleinsasser, A [+details]


Carbon ion extraction grids, used with controlled ion bombardment of the grids, sputter carbon onto the sample and introduce a controllable amount of carbon into an oxide layer.