Controlled Area Rate Lapping
Original Publication Date: 1983-Mar-01
Included in the Prior Art Database: 2005-Feb-07
Free abrasive lapping produces convex (5-10 Mum) surfaces, a problem which gets worse with fast lapping rates, larger areas and harder materials. This technique overcomes this problem, allowing fast lapping rates on hard (alumina) substrates and still obtain flat surfaces (less than 2 Mum).