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Controlled Area Rate Lapping

IP.com Disclosure Number: IPCOM000045459D
Original Publication Date: 1983-Mar-01
Included in the Prior Art Database: 2005-Feb-07

Publishing Venue

IBM

Related People

Authors:
Narken, B [+details]

Abstract

Free abrasive lapping produces convex (5-10 Mum) surfaces, a problem which gets worse with fast lapping rates, larger areas and harder materials. This technique overcomes this problem, allowing fast lapping rates on hard (alumina) substrates and still obtain flat surfaces (less than 2 Mum).