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Curved Top Side Vacuum Pencil

IP.com Disclosure Number: IPCOM000045462D
Original Publication Date: 1983-Mar-01
Included in the Prior Art Database: 2005-Feb-07

Publishing Venue

IBM

Related People

Authors:
Lowney, JJ Wong, MC [+details]

Abstract

A top-side vacuum pencil commonly used for handling wafers is a glass tubing attached to a vacuum line. The glass tube has a sufficiently large diameter, about 1/4 inch, in order to handle 3 1/4-inch wafers. The tube usually leaves behind residue or scratch marks on the wafer, giving rise to a "damaged" area extending about 1/4 inch from the edge of the wafer. As a result, a chip at that site could be adversely affected by the footprint of the vacuum pencil.