Curved Top Side Vacuum Pencil
Original Publication Date: 1983-Mar-01
Included in the Prior Art Database: 2005-Feb-07
A top-side vacuum pencil commonly used for handling wafers is a glass tubing attached to a vacuum line. The glass tube has a sufficiently large diameter, about 1/4 inch, in order to handle 3 1/4-inch wafers. The tube usually leaves behind residue or scratch marks on the wafer, giving rise to a "damaged" area extending about 1/4 inch from the edge of the wafer. As a result, a chip at that site could be adversely affected by the footprint of the vacuum pencil.