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Foil Electron Ion-Beam Lens

IP.com Disclosure Number: IPCOM000045537D
Original Publication Date: 1983-Apr-01
Included in the Prior Art Database: 2005-Feb-07

Publishing Venue

IBM

Related People

Authors:
McCorkle, RA [+details]

Abstract

In a focussed ion-beam system, the ion beam is passed through a thin metal foil after it Passes through the final focussing lens and before it strikes a target in order to electrically neutralize the beam and enable a sharper focus to be obtained at the target.