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Epitaxial Reactor Wafer Temperature Calibration Using FTIR Spectroscopy

IP.com Disclosure Number: IPCOM000045629D
Original Publication Date: 1983-Apr-01
Included in the Prior Art Database: 2005-Feb-07

Publishing Venue

IBM

Related People

Authors:
Kulkarni, SB Martin, SV [+details]

Abstract

The present Fourier Transform Infrared (FTIR) spectrometer technique calibrates the temperature of a wafer in an epitaxial reactor within less than 10 C.