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Browse Prior Art Database

Triple Layer System for High Resolution Microlithography

IP.com Disclosure Number: IPCOM000045704D
Original Publication Date: 1983-Apr-01
Included in the Prior Art Database: 2005-Feb-07

Publishing Venue

IBM

Related People

Authors:
Bassous, E Ephrath, L Mikalsen, D Rothman, LB [+details]

Abstract

A high-resolution microlithographic process is described which is particularly useful for patterning sub-micron features over sharp steps on a surface.