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Multiple Detectors Shorts and Opens Tester

IP.com Disclosure Number: IPCOM000045797D
Original Publication Date: 1983-Apr-01
Included in the Prior Art Database: 2005-Feb-07

Publishing Venue

IBM

Related People

Authors:
Bard, SL [+details]

Abstract

This arrangement provides an auxiliary detector 3, in addition to the present electron detector 5, in an electron beam tester. The auxiliary detector has the ability to determine the type of material being hit by the beam (such as an X-ray detector).