Method for forming N+ - P+ Tunnel Junctions
Original Publication Date: 1983-Apr-01
Included in the Prior Art Database: 2005-Feb-07
Tunnel diodes are useful for making high speed random-access memories and logic, specially if they can be integrated with high speed silicon NPN bipolar technologies. The process described is particularly suited for such applications because of its compatibility with the conventional NPN bipolar process and negligible additional heat cycles.