Browse Prior Art Database

Ceramic Boat

IP.com Disclosure Number: IPCOM000045832D
Original Publication Date: 1983-Apr-01
Included in the Prior Art Database: 2005-Feb-07

Publishing Venue

IBM

Related People

Authors:
DalCero, N Poweleit, HR [+details]

Abstract

A single ceramic boat is designed to qualify for use in several heat related process steps with a single temperature profile for all product types processed. The boat, used for carrying MLC (multilayer ceramic) substrates, is employed, for example, through metal diffusion, 24-hour bake and plasma ashing steps.