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Ceramic Boat Disclosure Number: IPCOM000045832D
Original Publication Date: 1983-Apr-01
Included in the Prior Art Database: 2005-Feb-07

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Related People

DalCero, N Poweleit, HR [+details]


A single ceramic boat is designed to qualify for use in several heat related process steps with a single temperature profile for all product types processed. The boat, used for carrying MLC (multilayer ceramic) substrates, is employed, for example, through metal diffusion, 24-hour bake and plasma ashing steps.