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Magnetic Enhancement by Sputter Power Alternation Disclosure Number: IPCOM000045896D
Original Publication Date: 1983-May-01
Included in the Prior Art Database: 2005-Feb-07

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Tietze, AR [+details]


Experiments with magnetron sputtering of 301 stainless steel using varying sputtering power have shown a surprising increase of H/c/ by about 40% over results using present coating practices, which repeatedly pass every spot on the disk with a speed of about 5-30 "/sec (l0-60 rpm) under the target. The significant characteristic of this approach is the continuous coating of the full coating thickness on every spot on the disk with alternating sputtering power with a frequency which coats every spot with about 5 full cycles. It appears important that the power alternation does not include zero power.