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An optical template selectively allows or prevents inspection of surface irregularities of a substrate.
English (United States)
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Templates for Substrate Inspections
An optical template selectively allows or prevents inspection of surface
irregularities of a substrate.
A method of eliminating inspection and subsequent rejection of substrates,
due to irregularities in areas of surface that correspond to non-functional areas, is
to implement templates that can be laid over the substrates to separate
functional areas of the surface from non-functional areas.
In other words, an overlay that covers non-functional areas, and is
transparent over functional areas, can be placed upon the substrates so that
visual inspection of the substrates is only over the functional areas. This overlay,
or template, can be obtained by reproducing the patterns of a functional mask on
a flexible medium. Also, the transparent regions on the overlay can be
appropriately oversized so that an error associated with the alignment of the
overlay with respect to the substrate edges is compensated for. Once the design
of the template is complete, multiple sets of the template can be obtained at
small cost, so that the template becomes an expendable/throwaway item.