Browse Prior Art Database

Templates for Substrate Inspections

IP.com Disclosure Number: IPCOM000045920D
Original Publication Date: 1983-May-01
Included in the Prior Art Database: 2005-Feb-07

Publishing Venue

IBM

Related People

Authors:
Abbott, CD Lagro, HC Mathur, BC [+details]

Abstract

An optical template selectively allows or prevents inspection of surface irregularities of a substrate.