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Differential Screw Micrometer

IP.com Disclosure Number: IPCOM000045924D
Original Publication Date: 1983-May-01
Included in the Prior Art Database: 2005-Feb-07

Publishing Venue


Related People

Wilson, AD [+details]


For generation of the small motions needed for alignment in X-ray lithography, a diaphragm is used to center and pre-load a threaded micrometer member in a differential micrometer arrangement.