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For generation of the small motions needed for alignment in X-ray lithography, a diaphragm is used to center and pre-load a threaded micrometer member in a differential micrometer arrangement.
English (United States)
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Differential Screw Micrometer
For generation of the small motions needed for alignment in X-ray
lithography, a diaphragm is used to center and pre-load a threaded micrometer
member in a differential micrometer arrangement.
A simple device is disclosed for converting rotary motion into linear motion.
The device consists of the very compact threaded unit shown in the figure. Outer
shell 10 is of a material like brass and is threaded on the inside 11 with a pitch N.
Inside this shell 10 is a rod 12 of brass-like material threaded with a pitch N-a.
Connecting these two members together is a steel part l4 whose outside
diameter 15 is threaded at pitch N while the inside 16 is threaded at pitch N-a.
Rod 12 is threaded into part 14 such that the desired pre-load in the threaded
parts occurs when diaphragm 18 connects shell 10 to rod 12, as shown. Probe
20 screws through diaphragm 18 into rod 12, attaching the diaphragm to rod 12.
The diaphragm is attached to shell 10 with small screws. To make sure the
threaded parts have the correct radial fit, shell 10 may be in split form with two
90» cuts extending about 2/3rds of its length. Shaft l4 can also be split but should
have three 120 cuts to minimize problems when the two cuts engage as part 14
is rotated. Alternatively, rod 12 can be split and a wedge screw axially driven in
from the shaft l4 end until the correct fit is obtained between rod 12 and shaft 14.
In either approach, lock ring 21 is adjusted to make shell 10 c...