Semiconductor Integrated Display With Anodized Light Barrier
Original Publication Date: 1983-May-01
Included in the Prior Art Database: 2005-Feb-07
An electrochromic or other passive matrix display has an array of display electrodes integrated on a semiconductor substrate. The semiconductor substrate includes an array of switching devices which are connected by via hole metallurgy through insulating layers to corresponding electrodes. Photoconduction in the semiconductor substrate is prevented by a metallic, preferably aluminum, light barrier. The surface of the light barrier is oxidized to provide an upper level of insulation and to prevent it shorting to the vias. The electrode metallurgy is then deposited directly on the oxidized layer. The light barrier is also employed as a mask for opening the vias through the underlying material by plasma etching.