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X-Ray Lithography Mask Alignment Stage

IP.com Disclosure Number: IPCOM000045948D
Original Publication Date: 1983-May-01
Included in the Prior Art Database: 2005-Feb-07

Publishing Venue

IBM

Related People

Authors:
Folchi, GA Gal, LV Wilson, AD [+details]

Abstract

An X-ray mask alignment stage is described in which the mask-holding platform is supported for frictionless movement in the mask plane by three or more flexible rods extending from a rigid frame.