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A removable nondestructive stain is used for visual inspection of the completeness or lack thereof of etched openings in a quartz layer.
English (United States)
This text was extracted from a PDF file.
This is the abbreviated version, containing approximately
75% of the total text.
Page 1 of 1
Visual Inspection of Quartz Etch by Removable Stain
A removable nondestructive stain is used for visual inspection of the
completeness or lack thereof of etched openings in a quartz layer.
In etching openings in the insulative quartz layer covering an underlying
circuitized metal layer of a silicon integrated circuit (IC) chip being fabricated, it is
difficult to ascertain visually whether the quartz in the opening has been
completely removed especially if the thickness of the remaining quartz in the
openings is one hundred angstroms or less. To aid in the visual inspection, a
stain which reacts with the underlying metal is applied through the tops of the via
openings. If the etch is complete, the stain discolors with a distinctive color, e.g.,
brown, the underlying metal that is exposed in the openings thereby indicating
that the etching is complete. On the other hand, if the metal is still covered by
some quartz, no discoloration occurs, indicating that the etch is incomplete and
that additional etching is required. The inspection is repeated by reapplying the
stain after each subsequent etch as often as is necessary. The stain is easily
removed with deionized (DI) water and does not effect the subsequent
processing of the chip associated with the formation of an overlying circuitized
metal layer on the upper surface of the quartz layer and metallization of the via
openings for conductively interconnecting the underlying and overlying metal