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Visual Inspection of Quartz Etch by Removable Stain

IP.com Disclosure Number: IPCOM000046026D
Original Publication Date: 1983-May-01
Included in the Prior Art Database: 2005-Feb-07

Publishing Venue

IBM

Related People

Authors:
Marcello, H [+details]

Abstract

A removable nondestructive stain is used for visual inspection of the completeness or lack thereof of etched openings in a quartz layer.