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Method of Controlling Edge Angles in a Polysilicon Layer

IP.com Disclosure Number: IPCOM000046061D
Original Publication Date: 1983-May-01
Included in the Prior Art Database: 2005-Feb-07

Publishing Venue

IBM

Related People

Authors:
Goessler, W Michaud, R Stadler, JP Vielhauer, K Weisleder, C Zurheide, M [+details]

Abstract

A method is described for controlling the edge angle in a polysilicon layer at 25 + 10Œ, wherein a borosilicate glass layer is used as an auxiliary layer in a photolithographic process.