Self-Actuating Vacuum Stops
Original Publication Date: 1983-Jun-01
Included in the Prior Art Database: 2005-Feb-07
This article describes a novel self-actuating vacuum stop for air bearing mechanisms and is particularly useful in buffers used in wafer- transport systems. The invention basically comprises three vacuum ports, each exposed at the corner of an isosceles triangle with the point of the triangle pointing in the upstream direction from whence the wafers are coming, and utilizes the presence of the wafer itself to reverse the vacuum flow rates between the port at the peak of the triangle and the remaining two vacuum ports at the base.