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Orientation Fixture for Electron Probe Microanalyzer

IP.com Disclosure Number: IPCOM000046197D
Original Publication Date: 1983-Jun-01
Included in the Prior Art Database: 2005-Feb-07

Publishing Venue

IBM

Related People

Authors:
Cain, JF Merritt, CR Rivenburgh, DL [+details]

Abstract

A specimen-holding fixture adjustably positions the specimen in an electron probe microanalyzer instrument system. The specimen, which is incident to the electron beam of the electron probe, is positioned so that the focal plane of the resultant X-rays emitted from the workpiece is adjusted relative to the detecting and analyzing X-ray spectrometer of the system.