Metal Silicide Formed by Laser Irradiation of Silicon Chip in Plating Solution
Original Publication Date: 1983-Jun-01
Included in the Prior Art Database: 2005-Feb-07
A solution containing the ion of a metal, such as palladium, is placed in contact with a silicon wafer and the wafer surface is radiated with a laser beam. A metal silicide is formed where the beam strikes the surface.