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Conductance-Limited Gate Valve in Load-Lock System

IP.com Disclosure Number: IPCOM000046391D
Original Publication Date: 1983-Jul-01
Included in the Prior Art Database: 2005-Feb-07

Publishing Venue

IBM

Related People

Authors:
Brancke, JS Carbone, QJ Muller, GD Wernikowski, R [+details]

Abstract

This article concerns a conductance-limited gate valve for use in isolating the source chamber from the product chamber in a load-lock vacuum system. The valve features means for controlling the turbulence which can occur when the vacuum system is rough pumped. Additionally, the valve features means for protecting product wafers against contamination.