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Browse Prior Art Database

Maskless Ball-Limiting Metallurgy

IP.com Disclosure Number: IPCOM000046392D
Original Publication Date: 1983-Jul-01
Included in the Prior Art Database: 2005-Feb-07

Publishing Venue

IBM

Related People

Authors:
Crnic, F Dalal, HM Jaspal, JS Roush, WB [+details]

Abstract

Ball-limiting metallurgy (BLM) is formed without masked subetching of the BLM by use of a blanket deposit of BLM and a masked deposit of PbSn followed by reactive ion etching of the BLM using the PbSn as a mask. A simpler and cleaner (no photoresist residue in vias) process is achieved along with self-alignment of the BLM to the PbSn.