Method of Sintering Large, Flat, Single Green Sheets
Original Publication Date: 1983-Jul-01
Included in the Prior Art Database: 2005-Feb-07
A technique has been previously described for fabricating a multilayer module using a totally thin-film approach. Individual sheets of fused quartz are used as the base on which the metals are evaporated. Holes can be laser drilled through the fused quartz for via connections. Such a technology has some long term attractiveness; however, ceramic materials other than glasses would be desirable. To form a large base of a crystalline material, one would have to either grow a large single crystal and cut it to proper size, or attempt to sinter a ceramic composition to yield a large (greater than 50 mm linear dimension), thin (250 microns or less) base. Prior attempts at forming large, thin single sheets by sintering have not been successful because the material will curl at the edges and will be extremely cambered.