Modified AC Light Source for Constant Output
Original Publication Date: 1983-Jul-01
Included in the Prior Art Database: 2005-Feb-07
This synchronization circuit effectively modifies an AC light source to provide a constant output to an optical signal. The circuit synchronizes the data sampling rate of an optical processing tool to the AC light. Specifically, the data sampling rate is synchronized with the peak intensity of the AC light source. AC variations of the source are eliminated from the optical information presented to a controlling computer for a tool, such as the automatic aligner of a wafer exposure tool.