Cooling System for Semiconductor Modules
Original Publication Date: 1983-Aug-01
Included in the Prior Art Database: 2005-Feb-07
A typical semiconductor module consists of a ceramic substrate 1 with pads 2 and conductors, to which semiconductor chips 4 are soldered by solder balls 5. This arrangement is encapsulated in a metal cap 6. The operating heat, produced in semiconductor chips 4, is dissipated by a heat conductor bridge to metal cap 6 from where it is removed, for example, by cooling ribs 7. To improve the heat dissipation rate, the heat is directly removed from chip 4 to cap 6. For this purpose, the rear sides of chips 4 are directly connected to the inside of cap 6, so that the thermal resistance between chip 4 and cap 6 is negligible. Through resilient pins or wires 3, solder balls 5 of chips 4 are connected to the pads on the surface of substrate 1.