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Disk Substrate Polisher

IP.com Disclosure Number: IPCOM000046895D
Original Publication Date: 1983-Aug-01
Included in the Prior Art Database: 2005-Feb-07

Publishing Venue

IBM

Related People

Authors:
Fox, DL Nordyke, DM [+details]

Abstract

The polisher includes a pair of polishing pads 10 and 12 effective on the opposite sides of disk 14. Pad 10 is fixed with respect to center line 16, while pad 12 has three degrees of freedom with respect to center line 16. Drive flange 18 is fixed to drive shaft 20, and pad 10 is fixed to and is supported by both the flange and shaft. Pad 12 is supported by outer flange 22 constituting a part of outer drive part 24 and is also supported by inner drive part 26 disposed within part 24. Part 26 is fixed with respect to part 24 by any suitable means, such as by means of screws 28. Inner drive part 26 has a cavity 30 therein of hexagonal cross section, and a hexagonal drive head 32 is fixed onto drive shaft 34 and functions to drive members 30 and 24, flange 22 and pad 12.