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Percloroethylene Reclaim and Emission Control Cycle for Mask Washing Operation

IP.com Disclosure Number: IPCOM000046962D
Original Publication Date: 1983-Sep-01
Included in the Prior Art Database: 2005-Feb-07

Publishing Venue

IBM

Related People

Authors:
Antonetti, VW Gupta, OR Torino, AL [+details]

Abstract

The percloroethylene (PCE) reclaim and emission control cycle reduces the PCE emissions to atmosphere after the mask washing cycle and eliminates the complete recycling of dirty PCE to a distillery after the wash cycle. The improvement is obtained by moving the mask 1 with frame 16 into the wash tank 2 via the present hydraulic drive. When the mask 1 is in place, the mechanism also provides sealing of the tank. The mask 1 is washed by preheated (120+Œ) PCE fluid 4. The PCE fluid is sprayed on by stationary nozzles 5 located on both sides of the tank 2. This wash cycle is tentatively of a 6-second duration. The contaminated PCE with binder 6 and molybdenum particles 7 is drained into the sump tank 8 by valve 9. The valve 9 is open during the wash cycle.