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High Conductance Particle Collector

IP.com Disclosure Number: IPCOM000047039D
Original Publication Date: 1983-Sep-01
Included in the Prior Art Database: 2005-Feb-07

Publishing Venue

IBM

Related People

Authors:
Carbone, QJ Muller, GD Wernikowski, R [+details]

Abstract

This article concerns a high conductance particle-collecting trap for protecting the pump in a vacuum system from contaminants arising in the system process chamber. The trap is defined by a housing which may be mounted in the vacuum line between the process chamber and pump of a vacuum system. The housing includes three stages of filtering: a two-element filter for removing particulate matter from the evacuant pulled through the trap by the vacuum system pump, an inlet port filter for receiving the evacuant from the process chamber, grossly filtering it and directing it to the two-element filter, and an output filter for finally filtering the evacuant as it exits the trap on its way to the system vacuum pump.