Original Publication Date: 1983-Nov-01
Included in the Prior Art Database: 2005-Feb-07
This article concerns a cryogenic trap for use in a vacuum system. The trap condenses and removes process chamber atmosphere which, if left unchecked, could damage the system vacuum pump and additionally condenses and removes backstreaming vacuum pump hydrocarbons which could contaminate the vacuum chamber if left unchecked. The trap features a molecular sieve enhanced by cryogenic cooling and an opaque filter for the respective condensation and removal of process chamber atmosphere and backstreaming vacuum pump hydrocarbons. The cryogenic trap, in accordance with this article, is shown in the figure. As shown there, trap 10 is defined by a housing 12 having a first chamber 14 and a second chamber 16. As shown, chamber 16 is axially joined to and in communication with chamber 14.