Browse Prior Art Database

Automated Topography Measurement System

IP.com Disclosure Number: IPCOM000047461D
Original Publication Date: 1983-Nov-01
Included in the Prior Art Database: 2005-Feb-07

Publishing Venue

IBM

Related People

Authors:
Feliss, NA [+details]

Abstract

The surface topography of an element can be measured by means of the system shown in Fig. 1. The technique of measuring crown and recession makes use of an experimental apparatus employing monochromatic inter ferometry, data acquisition instrumentation, and computer algorithms to calculate the curvature or deformity of the interferometric fringes. Monochromatic fringes using light of wavelength g are projected onto the rail of the element (magnified 30x for crown, twist and camber, and 100x for recession). The fringes are aligned parallel to the rail as observed in Fig. 2 and 3 for measuring both crown and recession. Any slight deviation of the fringes from a straight line indicates surface contour changes.