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Method of Reducing Screened Metal Line Resistance

IP.com Disclosure Number: IPCOM000047567D
Original Publication Date: 1983-Dec-01
Included in the Prior Art Database: 2005-Feb-07

Publishing Venue

IBM

Related People

Authors:
Desai, KS [+details]

Abstract

During multilayer ceramic substrate manufacture, metal lines are screened on ceramic green sheets for signal-carrying purposes. As the lines become finer, the line resistance increases to unacceptable levels. Disclosed herein is a method of reducing screened metal line resistance by delaying removal of the screening mask from the green sheet for a predetermined time. Referring to the figure, metal paste 1 is screened onto green sheet 2 through screening mask 3 to form a metal line. For a given line width, the resistance may be reduced by increasing the metal paste height. Paste height can be increased by delaying removal of mask 3 after screening. This allows the paste to further dry and causes the paste-shearing line 4 to move in the direction of arrow 4. Mask removal delays from 2-15 seconds may be employed.