Improved Process Controller Display
Original Publication Date: 1983-Dec-01
Included in the Prior Art Database: 2005-Feb-07
The process controller for the Applied Materials Corporation AMC-7600 sequences reactor displays and the function or mode of the system and elapsed time for each process operation. When a fault occurs in the reactor, the controller is not adapted to hold the display information. This invention enables the controller to hold and display the process step and the elapsed time while clearing all machine operating functions. The drawing shows circuitry included in the AMC-7600 reactor.