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Air Film Wedge Standard For Film Thickness Probe

IP.com Disclosure Number: IPCOM000048045D
Original Publication Date: 1981-Dec-01
Included in the Prior Art Database: 2005-Feb-08

Publishing Venue

IBM

Related People

Authors:
DeWalt, DH Fallenstein, MJ [+details]

Abstract

A calibration/monitoring calibration program requires an "artifact standard" such as an air film wedge standard. A glass and ferrite assembly, held against the bottom surface of a transparent disk within a film thickness probe (FTP) fly height tester or any other fly height tester, would make a suitable "artifact standard."