The following operators can be used to better focus your queries.
( ) , AND, OR, NOT, W/#
? single char wildcard, not at start
* multi char wildcard, not at start
(Cat? OR feline) AND NOT dog?
Cat? W/5 behavior
(Cat? OR feline) AND traits
Cat AND charact*
This guide provides a more detailed description of the syntax that is supported along with examples.
This search box also supports the look-up of an IP.com Digital Signature (also referred to as Fingerprint); enter the 72-, 48-, or 32-character code to retrieve details of the associated file or submission.
Concept Search - What can I type?
For a concept search, you can enter phrases, sentences, or full paragraphs in English. For example, copy and paste the abstract of a patent application or paragraphs from an article.
Concept search eliminates the need for complex Boolean syntax to inform retrieval. Our Semantic Gist engine uses advanced cognitive semantic analysis to extract the meaning of data. This reduces the chances of missing valuable information, that may result from traditional keyword searching.
This article describes a tool for trimming films and is especially useful for rapidly and cleanly trimming the excess film from a pellicle assembly for use with a semiconductor device.
English (United States)
This text was extracted from a PDF file.
At least one non-text object (such as an image or picture) has been suppressed.
This is the abbreviated version, containing approximately
85% of the total text.
Page 1 of 2
Pellicle Trim Tool
This article describes a tool for trimming films and is especially useful for
rapidly and cleanly trimming the excess film from a pellicle assembly for use with
a semiconductor device.
Pellicles as used in semiconductor masks are widely known and basically
comprise a film stretched across a mounting ring which is mounted on a
semiconductor mask and protects the masks from dust particles while
maintaining the dust particles out of the focal plane of the mask.
In the past, trimming of such masks has been difficult. The figure shows a
tool 10 generally sued for trimming the pellicle film 11 which is shown mounted
on a pellicle ring 12 and supported in a stretching base 13. The tool utilizes three
legs 16, 17, and 18, each one having a cutting wheel at the bottom thereof and
carried by an upper member 15 in fixed position. The leg 16 is mounted onto the
carrier plate 15 by a suitable pivoting mechanism and has an extending finger 19
which is biased by a spring 20 so as to pull the member 19 tight against the T-bar
plunger 21 which passes through a suitable opening in the support member 15.
By pressing down on the T-bar member 21, the leg 16 can be made to spring out
away from the pellicle. In operation, the T-bar member 21 is depressed and leg
16 is open, and the entire tool is placed around the pellicle ring 12 such that the
wheels on each of the legs engage a groove 14 on the pellicle ring. The T-bar is
then released and the spring load at leg 16...