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Browse Prior Art Database

Pellicle Trim Tool

IP.com Disclosure Number: IPCOM000048116D
Original Publication Date: 1981-Dec-01
Included in the Prior Art Database: 2005-Feb-08

Publishing Venue

IBM

Related People

Authors:
Fox, DD [+details]

Abstract

This article describes a tool for trimming films and is especially useful for rapidly and cleanly trimming the excess film from a pellicle assembly for use with a semiconductor device.