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Browse Prior Art Database

Programmable Z Stage

IP.com Disclosure Number: IPCOM000048168D
Original Publication Date: 1981-Dec-01
Included in the Prior Art Database: 2005-Feb-08

Publishing Venue

IBM

Related People

Authors:
Lachtrupp, D Torino, AC [+details]

Abstract

This Z-Stage assembly is used for supporting and elevating a semiconductor wafer, held by a vacuum chuck, during testing operation. The wafer, mounted on the chuck, is pushed upwardly into contact with a contact probe that makes electrical contact with the pads on the wafer.