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Controlled Laser Annealing By Raman Frequency Feedback

IP.com Disclosure Number: IPCOM000048241D
Original Publication Date: 1982-Jan-01
Included in the Prior Art Database: 2005-Feb-08

Publishing Venue

IBM

Related People

Authors:
Jain, K [+details]

Abstract

A system is described which utilizes the feedback of a characteristic Raman frequency to control the power and/or dwell of an annealing laser beam.