Inclined Specimen Support For Low Loss Scanning Electron Microscopy
Original Publication Date: 1982-Feb-01
Included in the Prior Art Database: 2005-Feb-08
In performing scanning electron microscopy, it would be highly desirable to have a specimen support which holds a specimen at a precisely defined angle relative to the microscope optic axis. Such a support may be obtained by taking advantage of the fact that chemical etching of (001) Si wafers produces exposed (111) type planes which make precise angles of 54 Degrees 44 Degrees with the (001) planar surfaces of the Si.