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Inclined Specimen Support For Low Loss Scanning Electron Microscopy

IP.com Disclosure Number: IPCOM000048466D
Original Publication Date: 1982-Feb-01
Included in the Prior Art Database: 2005-Feb-08

Publishing Venue

IBM

Related People

Authors:
Krakow, W Speidell, JL Trafas, G [+details]

Abstract

In performing scanning electron microscopy, it would be highly desirable to have a specimen support which holds a specimen at a precisely defined angle relative to the microscope optic axis. Such a support may be obtained by taking advantage of the fact that chemical etching of (001) Si wafers produces exposed (111) type planes which make precise angles of 54 Degrees 44 Degrees with the (001) planar surfaces of the Si.