Browse Prior Art Database

Micromanipulator For In-Situ SEM Experiments

IP.com Disclosure Number: IPCOM000048467D
Original Publication Date: 1982-Feb-01
Included in the Prior Art Database: 2005-Feb-08

Publishing Venue

IBM

Related People

Authors:
Aliotta, CF Constantino, AJ Ho, PS [+details]

Abstract

A micromanipulator probe is described which may be used to apply or sense voltages and/or currents over a very small device area during inspection with a scanning electron microscope (SEM) for electrical testing or as a research tool for measuring grain growth, hillock growth or diffusivity.