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Micromanipulator For In-Situ SEM Experiments Disclosure Number: IPCOM000048467D
Original Publication Date: 1982-Feb-01
Included in the Prior Art Database: 2005-Feb-08

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Aliotta, CF Constantino, AJ Ho, PS [+details]


A micromanipulator probe is described which may be used to apply or sense voltages and/or currents over a very small device area during inspection with a scanning electron microscope (SEM) for electrical testing or as a research tool for measuring grain growth, hillock growth or diffusivity.