Use Of Alternate O-Ring Material And Protective Sleeve
Original Publication Date: 1982-Feb-01
Included in the Prior Art Database: 2005-Feb-08
In a number of semiconductor processing apparatus it is necessary to join two or more units by means of 0-rings compressed between the adjacent surfaces. When hot gases pass over the joint, rapid decay of the O-ring can occur, depending upon the temperature and composition of the gases and the ring itself. Even in the most destructive atmospheres it has now been found that such O-rings can have an extended life if a protective quartz sleeve is provided in the tube, such that it will prevent the gases from contacting the O-ring directly.