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Chemical Bevelling For Determining the Defect-Free Zone

IP.com Disclosure Number: IPCOM000048585D
Original Publication Date: 1982-Feb-01
Included in the Prior Art Database: 2005-Feb-08

Publishing Venue

IBM

Related People

Authors:
Cameron, DP Kulkarni, MV Martin, DG Nagasaki, T [+details]

Abstract

Chemical bevelling, preferential etching for defect delineation and SEM (Scanning Electron Microscope) observations allow precise characterization of defects for location, type, and number. Thus, a defect-free zone can be defined quantitatively in terms of a number within a certain thickness per unit length observed.