Chemical Bevelling For Determining the Defect-Free Zone
Original Publication Date: 1982-Feb-01
Included in the Prior Art Database: 2005-Feb-08
Chemical bevelling, preferential etching for defect delineation and SEM (Scanning Electron Microscope) observations allow precise characterization of defects for location, type, and number. Thus, a defect-free zone can be defined quantitatively in terms of a number within a certain thickness per unit length observed.