Multiple Experiment Hot Process Vehicle
Original Publication Date: 1982-Feb-01
Included in the Prior Art Database: 2005-Feb-08
At present, single boats are used to run wafers in batch processing in order to see the effects of temperature, warpage, etc. Due to changes in boat or wafer configurations, several runs are required to simulate the desired changes. Any time delay between runs may cause perturbations in the data that could invalidate any comparisons (i.e, furnace failures between runs, gas flow changes, etc.). This article describes a structure that provides a multiple parameter vehicle that can be run in a single experiment, thus avoiding several individual boats and designs as well as saving appreciable experimental run times.