Browse Prior Art Database

Radial Etch Control Boat

IP.com Disclosure Number: IPCOM000048601D
Original Publication Date: 1982-Feb-01
Included in the Prior Art Database: 2005-Feb-08

Publishing Venue

IBM

Related People

Authors:
Ryan, JG [+details]

Abstract

This article describes a closed-boat system that is superior to the other methods for obtaining etch rate uniformity and thus smaller image size tolerances.