Browse Prior Art Database

Wafer Holder

IP.com Disclosure Number: IPCOM000048603D
Original Publication Date: 1982-Feb-01
Included in the Prior Art Database: 2005-Feb-08

Publishing Venue

IBM

Related People

Authors:
Wojciekofsky, E Pike, MB [+details]

Abstract

This wafer holder provides accurate orientation of an 82 mm SP OT wafer for measurement of particulate contamination of the mask side of the tool.